CDM integrated thickness & areaal density gauge

Daim ntawv thov

Txheej txheej: on-line nrhiav tau ntawm cov yam ntxwv me me ntawm electrode; Cov yam ntxwv me me ntawm electrode: nyiaj so koobtsheej tshaib plab (tsis muaj qhov xau ntawm cov khoom siv tam sim no, me me grey sib txawv nrog cov txheej txheem ib txwm muaj, tsis ua haujlwm ntawm CCD kev txheeb xyuas), khawb, thickness contour ntawm thinning cheeb tsam, AT9 thickness nrhiav thiab lwm yam.

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Product Detail

Khoom cim npe

Cov ntsiab cai ntawm kev ntsuas

Cov ntsiab cai ntawm kev ntsuas qhov ntom ntom

X/β-ray absorption method

Cov ntsiab lus ntawm kev ntsuas thickness

Correlation & laser triangulation

CDM kev xeem cov yam ntxwv

Scenario 1: Muaj 2 hli dav hnub so / tsis txaus ntawm lub electrode nto thiab ib ntug yog thicker (xiav kab raws li qhia hauv qab). Thaum lub teeb pom kev zoo yog 40 hli, qhov cuam tshuam ntawm qhov ntsuas cov ntaub ntawv qub (cov kab txiv kab ntxwv raws li qhia hauv qab) zoo li me dua.

Scenario 2: profile cov ntaub ntawv ntawm dynamic thinning cheeb tsam 0.1mm cov ntaub ntawv dav

Software nta

Technical parameters

Lub npe	Index
Scanning ceev	0-18m / min
Sampling zaus	Nto ntom ntom: 200 kHz; Thickness: 50 kHz
Kev ntsuas qhov ntom ntom ntom ntom	Qhov ntom ntom: 10 ~ 1000 g / m²; Thickness: 0 ~ 3000 hli;
Kev ntsuas rov ua dua raug	Qhov ntom ntom ntom: 16s integral: ± 2σ: ≤ ± tus nqi tseeb * 0.2‰ lossis ± 0.06g / m²; ± 3σ: ≤ ± tus nqi tseeb * 0.25‰ lossis +0.08g / m²; 4s integral: ± 2σ: ≤ ± tus nqi tseeb * 0.4‰ lossis ± 0.12g / m²; ± 3σ: ≤ ± tus nqi tseeb * 0.6‰ lossis ± 0.18g / m²;Thickness: 10 hli cheeb tsam: ± 3σ: ≤ ± 0.3μm; 1 mm cheeb tsam: ± 3σ: ≤ ± 0.5μm; 0.1 hli cheeb tsam: ± 3σ: ≤ ± 0.8μm;
Kev sib raug zoo R2	Nto ntom ntom> 99%; thickness> 98%;
Laser qhov chaw	25 * 1400 hli
Radiation tiv thaiv chav kawm	GB 18871-2002 tus qauv kev nyab xeeb hauv tebchaws (kev zam hluav taws xob)
Kev pab lub neej ntawm radioactive qhov chaw	β-ray: 10.7 xyoo (Kr85 ib nrab-lub neej); X-ray: > 5 xyoos
Teb lub sijhawm ntsuas	Qhov ntom ntom <1ms; thickness <0.1ms;
Lub zog tag nrho	<3 kW